Cannot delete area
Deleting the area 'Cleanroom' would require deleting the following protected related objects:
- Tool: Dicing saw
- Tool: Atomic Layer Deposition
- Tool: Unaxis Deep Si Etcher
- Tool: XeF2 Silicon Etcher
- Tool: Microwave Asher
- Tool: Ion Mill
- Tool: Unaxis ICP Etcher
- Tool: ZEISS FESEM
- Tool: ASML Stepper
- Tool: SussMA6
- Tool: SussMA8
- Tool: HMDS Prime
- Tool: Hotplate 1
- Tool: Hotplate 2
- Tool: Vac Oven 1
- Tool: Vac Oven 2
- Tool: Vac Oven 3
- Tool: Laser Mask Writer
- Tool: Nano-imprinter
- Tool: Film Stress
- Tool: Goniometer
- Tool: Ellipsometer
- Tool: Dektak XT 1
- Tool: Sputter B104 Left
- Tool: Sputter B104 Right
- Tool: Parylene Deposition
- Tool: Wafer Bonder
- Tool: Critical Point Dryer 1
- Tool: Critical Point Dryer 2
- Tool: B101 RCA Bench
- Tool: B101 Hot Phos Bench
- Tool: B101 KOH Bench
- Tool: B101 Solvent Hood
- Tool: B102 Acid Hood
- Tool: A103 Photomask Bench
- Tool: Metal Liftoff
- Tool: Parametric Test
- Tool: B102 Spin Rinse Dryer
- Tool: Bruker AFM
- Tool: B101 Spin Rinse Dryer
- Tool: SPTS HF Vapor Etcher
- Tool: SPTS Deep Si Etch
- Tool: JEOL E-beam Cleanroom
- Tool: Filmetrics F40-UV
- Tool: NanoSpec
- Tool: Jandel 4pt Probe
- Tool: 4Wave Cluster Sputter
- Tool: Suss Resist Coater
- Tool: Suss Resist Developer
- Tool: Downstream Asher
- Tool: Four Dimensions 4pt Probe
- Tool: Dektak XT 2
- Tool: PDMS Spin Coater
- Tool: PDMS Mixer
- Tool: PDMS Plasma Bonder
- Tool: PDMS Curing Oven 1
- Tool: PDMS Puncher
- Tool: Microfluidic Test Station
- Tool: Silanization Oven
- Tool: PDMS Curing Oven 2
- Tool: AnnealSys RTA
- Tool: SSEC Piranha 1
- Tool: SSEC Piranha 2
- Tool: SSEC RCA
- Tool: DUV Resist Stabilizer
- Tool: MLA 150
- Tool: Nitrogen Oven
- Tool: Mercury Probe
- Tool: RHL Tube 1 Oxide
- Tool: RHL Tube 2 Anneal
- Tool: RHL Tube 3 Nitride
- Tool: RHL Tube 4 Poly
- Tool: LHL Tube 1 Oxide
- Tool: LHL Tube 2 Anneal
- Tool: LHL Tube 3 Nitride
- Tool: Sensofar Optical Profilometer
- Tool: LHL Tube 4 LTO
- Tool: A103 Spinner Left
- Tool: A104 EBL Spinner Left
- Tool: B102 Furnace RCA Clean
- Tool: 790 RIE Middle
- Tool: 790 RIE Right
- Tool: 790 RIE Nitride Left
- Tool: E-Beam and Thermal Evaporator
- Tool: E-Beam Evaporator
- Tool: Oxford Metal Etcher
- Tool: Oxford Silicon Etcher
- Tool: Oxford III-V Etcher
- Tool: Gemini 500 FESEM