Main dashboard
Alerts & outages
Cleanroom closed this weekend
The cleanroom will be closed this weekend for maintenance
The cleanroom will be closed this weekend for maintenance
Current Facility use
You are using the Oxford Silicon Etcher for the project named Cleanroom Eng since Sunday, August 17th, 2025 @ 1:57 AM.
You are using the Unaxis Deep Si Etcher for the project named Cleanroom Maint since Friday, August 15th, 2025 @ 1:40 AM.
You are using the Dektak XT 1 for the project named Project 2 since Wednesday, August 6th, 2025 @ 3:18 PM.
You are using the B101 KOH Bench for the project named Project 2 since Monday, August 4th, 2025 @ 10:30 AM.
You are using the 790 RIE Middle for the project named Cleanroom Eng since Friday, July 25th, 2025 @ 12:22 PM.
You are using the Sinter for the project named Project 2 since Wednesday, July 23rd, 2025 @ 11:05 AM.
You are using the Microfluidic Test Station for the project named Project 2 since Wednesday, July 16th, 2025 @ 8:08 AM.
You are using the JEOL E-beam for the project named Cleanroom Eng since Friday, July 11th, 2025 @ 4:34 AM.
You are using the FEI FIB 1 for the project named Project 2 since Tuesday, July 8th, 2025 @ 8:09 AM.
You are using the PECVD for the project named Project 2 since Thursday, June 21st, 2018 @ 4:36 PM.
You are not logged in to an access controlled area. Click here to log in.
