| Urgency | Severity | Tool | Category | Last updated | Created | Description |
|---|---|---|---|---|---|---|
| High | Sinter | 7 years ago by Captain | 7 years ago | Tool is offline for maintenance | ||
| High | PECVD | 1 year, 4 months ago by Pierre | 1 year, 4 months ago | Electrode temperature did not increase in the beginning of the 180 C cleaning recipe. Aborted job. | ||
| High | LHL Tube 1 Oxide | Computer error | 1 month, 2 weeks ago | ewsfsef | ||
| High | Oxford Metal Etcher | User error | 1 month, 2 weeks ago | kjjk | ||
| High | Oxford III-V Etcher | Computer error | 1 month, 2 weeks ago | 521 | ||
| High | Microwave Asher | door issue | 1 month, 1 week ago | not opening | ||
| High | LHL Tube 2 Anneal | door issue | 1 month ago | door is blocked | ||
| High | JEOL E-beam Cleanroom | User error | 6 days, 4 hours ago | lhkgjkhgv | ||
| Normal | Dicing saw | 7 years ago | Blade needs to be changed | |||
| Normal | Bruker AFM | Computer error | 6 days, 5 hours ago | todo va mal |
| Urgency | Severity | Tool | Category | Created | Resolved | Description |
|---|---|---|---|---|---|---|
| High | Oxford Silicon Etcher | User error | Thursday, May 8th, 2025 @ 9:01 AM | Wednesday, June 11th, 2025 @ 8:47 AM | 111 | |
| Normal | 790 RIE Middle | Saturday, June 7th, 2025 @ 1:37 PM | Saturday, June 7th, 2025 @ 2:02 PM | loadlock pump failed | ||
| Normal | 790 RIE Middle | Saturday, June 7th, 2025 @ 1:32 PM | Saturday, June 7th, 2025 @ 1:39 PM | Tool failed to strike plasma. | ||
| High | Microwave Asher | Computer error | Thursday, May 8th, 2025 @ 9:03 AM | Wednesday, May 21st, 2025 @ 8:05 PM | 515 | |
| Normal | 790 RIE Right | Tuesday, April 15th, 2025 @ 8:01 PM | Thursday, May 8th, 2025 @ 10:48 AM | f | ||
| Low | 790 RIE Nitride Left | User error | Tuesday, April 15th, 2025 @ 8:01 PM | Thursday, May 8th, 2025 @ 9:11 AM | n |