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Maintenance

Urgency Severity Tool Category Last updated Created Description
High Sinter 6 years, 9 months ago by Captain 6 years, 9 months ago Tool is offline for maintenance
High PECVD 1 year, 2 months ago by Pierre 1 year, 1 month ago Electrode temperature did not increase in the beginning of the 180 C cleaning recipe. Aborted job.
Normal Dicing saw 6 years, 9 months ago Blade needs to be changed
Urgency Severity Tool Category Created Resolved Description