| Urgency | Severity | Tool | Tool category | Problem category | Last updated | Created | Description |
|---|---|---|---|---|---|---|---|
| High | PECVD | Chemical Vapor Deposition | 2 weeks, 3 days ago by Captain | 2 years, 1 month ago | Electrode temperature did not increase in the beginning of the 180 C cleaning recipe. Aborted job. | ||
| Normal | Dicing saw | Packaging | 7 years, 9 months ago | Blade needs to be changed | |||
| Normal | Oxford Metal Etcher | Dry Etch | User error | 2 days, 5 hours ago | I put a rat in the load lock :( |
| Urgency | Severity | Tool | Category | Created | Resolved | Description |
|---|---|---|---|---|---|---|
| High | Sinter | Thursday, June 21st, 2018 @ 5:02 PM | Tuesday, March 24th, 2026 @ 11:00 PM | Tool is offline for maintenance |