Skip to main content

Maintenance

Urgency Severity Tool Category Last updated Created Description
High Sinter 6 years, 8 months ago by Captain 6 years, 8 months ago Tool is offline for maintenance
High PECVD 1 year, 1 month ago by Pierre 1 year ago Electrode temperature did not increase in the beginning of the 180 C cleaning recipe. Aborted job.
High 790 RIE Middle 2 months, 3 weeks ago test
Normal Dicing saw 6 years, 8 months ago Blade needs to be changed
Normal Hall Effect Measurement User error 2 weeks, 2 days ago set up the wrong parameters
Normal B101 Acid Hood User error 1 week, 1 day ago IT BROKEN
Urgency Severity Tool Category Created Resolved Description