PECVD rate
The rates for tool usage & training, area access and staff charges are to be expressed per hour.
Tool usage |
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| Effective date | Amount | Minimum charge | Service fee | Flat | Daily rate | |
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Tool individual training |
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| Effective date | Amount | Minimum charge | Service fee | Flat | Daily rate | |
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Tool group training |
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| Effective date | Amount | Minimum charge | Service fee | Flat | Daily rate | |
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