- ASML Design Station
- ASML Stepper
- DUV Resist Stabilizer
- HMDS Prime
- Hotplate 1
- Hotplate 2
- JEOL E-beam
- JEOL E-beam Cleanroom
- Laser Mask Writer
- MLA 150
- Nano-imprinter
- Nitrogen Oven
- Suss Resist Coater
- Suss Resist Developer
- SussMA6
- SussMA8
- Vac Oven 1
- Vac Oven 2
- Vac Oven 3
- A102 Develop Hood
- A102 Spinner Hood
- A102 Spinner Left
- A102 Spinner Right
- A103 Develop Hood
- A103 Photomask Bench
- A103 Spinner Hood
- A103 Spinner Left
- A103 Spinner Right
- A104 EBL Develop Hood Left
- A104 EBL Develop Hood Right
- A104 EBL Spinner Hood
- A104 EBL Spinner Left
- A104 EBL Spinner Right
- A105 Develop Hood
- A105 Solvent Hood