Usage between Thursday, January 1st, 2026 and Saturday, January 31st, 2026
This page presents a monthly report of your Facility use. Approved adjustments are not reflected in the usage data.
This data is provided for informational purposes and uses the latest rates.
Other adjustments/discounts might not be included in this information.
Other adjustments/discounts might not be included in this information.
Total charges: 0.00
Tool usage
790 RIE Right
Monday, January 5th, 2026 @ 11:23 AM
Monday, January 5th, 2026 @ 11:24 AM
Charged to project Cleanroom Eng
Monday, January 5th, 2026 @ 11:23 AM
Monday, January 5th, 2026 @ 11:24 AM
Charged to project Cleanroom Eng
Post run data
| What material did you you etch? : | Silicon oxide |
| How long did you etch? : | 60 min |
E-Beam Evaporator
Sunday, January 4th, 2026 @ 11:11 PM
Sunday, January 4th, 2026 @ 11:12 PM
Charged to project Project 3
Sunday, January 4th, 2026 @ 11:11 PM
Sunday, January 4th, 2026 @ 11:12 PM
Charged to project Project 3
790 RIE Middle
Friday, January 2nd, 2026 @ 8:57 PM
Sunday, January 4th, 2026 @ 5:20 PM
Charged to project Cleanroom Eng
Friday, January 2nd, 2026 @ 8:57 PM
Sunday, January 4th, 2026 @ 5:20 PM
Charged to project Cleanroom Eng
LHL Tube 1 Oxide
Wednesday, December 24th, 2025 @ 9:45 AM
Sunday, January 4th, 2026 @ 5:34 PM
Charged to project Cleanroom Eng
Wednesday, December 24th, 2025 @ 9:45 AM
Sunday, January 4th, 2026 @ 5:34 PM
Charged to project Cleanroom Eng
A106 Base Hood
Monday, December 22nd, 2025 @ 10:34 PM
Sunday, January 4th, 2026 @ 5:34 PM
Charged to project Cleanroom Eng
Monday, December 22nd, 2025 @ 10:34 PM
Sunday, January 4th, 2026 @ 5:34 PM
Charged to project Cleanroom Eng
PDMS Puncher
Wednesday, December 17th, 2025 @ 10:11 AM
Sunday, January 4th, 2026 @ 5:34 PM
Charged to project Project 3
Wednesday, December 17th, 2025 @ 10:11 AM
Sunday, January 4th, 2026 @ 5:34 PM
Charged to project Project 3
PECVD
Wednesday, December 10th, 2025 @ 4:14 PM
Friday, January 2nd, 2026 @ 7:59 PM
Charged to project Project 3
Wednesday, December 10th, 2025 @ 4:14 PM
Friday, January 2nd, 2026 @ 7:59 PM
Charged to project Project 3
790 RIE Nitride Left
Wednesday, December 10th, 2025 @ 6:28 AM
Sunday, January 4th, 2026 @ 5:20 PM
Charged to project Project 3
Wednesday, December 10th, 2025 @ 6:28 AM
Sunday, January 4th, 2026 @ 5:20 PM
Charged to project Project 3
FEI FIB 1
Monday, December 8th, 2025 @ 10:02 AM
Sunday, January 4th, 2026 @ 5:34 PM
Charged to project Project 3
Monday, December 8th, 2025 @ 10:02 AM
Sunday, January 4th, 2026 @ 5:34 PM
Charged to project Project 3
PDMS Curing Oven 1
Tuesday, October 28th, 2025 @ 3:16 PM
Sunday, January 4th, 2026 @ 5:21 PM
Charged to project Cleanroom Eng
Tuesday, October 28th, 2025 @ 3:16 PM
Sunday, January 4th, 2026 @ 5:21 PM
Charged to project Cleanroom Eng
AnnealSys RTA
Tuesday, October 28th, 2025 @ 3:08 PM
Sunday, January 4th, 2026 @ 5:20 PM
Charged to project Project 3
Tuesday, October 28th, 2025 @ 3:08 PM
Sunday, January 4th, 2026 @ 5:20 PM
Charged to project Project 3
Atomic Layer Deposition
Monday, October 27th, 2025 @ 2:48 PM
Friday, January 2nd, 2026 @ 7:59 PM
Charged to project Cleanroom Eng
Monday, October 27th, 2025 @ 2:48 PM
Friday, January 2nd, 2026 @ 7:59 PM
Charged to project Cleanroom Eng
790 RIE Middle
Saturday, October 25th, 2025 @ 8:16 PM
Friday, January 2nd, 2026 @ 8:56 PM
Charged to project Project 3
Saturday, October 25th, 2025 @ 8:16 PM
Friday, January 2nd, 2026 @ 8:56 PM
Charged to project Project 3
Asylum AFM
Thursday, October 9th, 2025 @ 3:06 AM
Sunday, January 4th, 2026 @ 5:20 PM
Charged to project Cleanroom Eng
Thursday, October 9th, 2025 @ 3:06 AM
Sunday, January 4th, 2026 @ 5:20 PM
Charged to project Cleanroom Eng
Jandel 4pt Probe
Wednesday, September 17th, 2025 @ 8:16 AM
Sunday, January 4th, 2026 @ 5:20 PM
Charged to project Project 2
Wednesday, September 17th, 2025 @ 8:16 AM
Sunday, January 4th, 2026 @ 5:20 PM
Charged to project Project 2